GB/T 31352-2014
ActiveTest methods for warp of sapphire substrates
蓝宝石衬底片翘曲度测试方法
Application Summary AI generated
This standard specifies the test methods for measuring the warp of sapphire substrates, which are thin, disc-shaped wafers used as base materials for LED and semiconductor device fabrication. It is applied in the metallurgy and optoelectronics industries, specifically during the quality inspection and process control of sapphire substrates to ensure they meet flatness requirements for subsequent epitaxial growth and lithography. The standard provides procedures for using non-contact optical or mechanical gauges to quantify substrate deformation under defined conditions.
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